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Cleaning process optimization in a gate oxide cluster tool using an in-line XPS module
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1997
Conference Paper
Titel
Cleaning process optimization in a gate oxide cluster tool using an in-line XPS module
Author(s)
Froeschle, B.
Glowacki, F.
Bauer, A.J.
Kasko, I.
Öchsner, R.
Schneider, C.
Hauptwerk
Rapid thermal and integrated processing VI
Konferenz
Materials Research Society (Symposium) 1997
Language
English
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