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Charakterisierung ultrapräzisionsbearbeiteter Materialien mittels Rastersonden-Mikroskopie

Characterization of micromachined surfaces by scanning force microscopy
 

Deutscher Verband für Materialforschung und -prüfung e.V. -DVM-, Berlin:
RM Analytik von Werkstoffen und Bauteilen. RM Einrichtungen und Verfahren in der Oberflächenanalytik - RM in Mikro- und Nontechnologie
Berlin, 1994
pp.145-152
Arbeitskreis Rastermikroskopie in der Materialprüfung (Vortragsveranstaltung) <16, 1994, Dresden>
German
Conference Paper
Fraunhofer IZFP ()
atomic force microscopy; Diamantdrehen; diamond turning; grain boundary; Korngrenze; Kraftmikroskopie; micromachining; Mikrozerspanung; Oberfächenrauheitsmessung; Rasterkraftmikroskopie; Rastersondenmikroskopie; Sanning Probe Microscopy; scanning force microscopy; surface roughness measurement; Ultrapräzisionsbearbeitung

Abstract
Micromachined surfaces of polycrystalline copper, aluminium, brass and monocrystalline silicon and germanium were imaged by Scanning Force Microscopy (SFM). We pointed out that the high spatial frequency surface roughness can be measured with the SFM. Grain boundaries and sub-grain structures on diamond-turned surfaces with a spatial wavelength below 1 fm were qualified and quantified. Scratch tests were made on the different materials. SFM images of the grooves showed each material's plastic deformation, and its behaviour in the vincinity of grain boundaries. A critical depth of cut of 40 nm was found, below which chip removal changed, from brittle to ductile mode.

: http://publica.fraunhofer.de/documents/PX-7599.html