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  4. Characterization of thin diamond-like carbon films by ultrasonic surface waves
 
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1993
Journal Article
Title

Characterization of thin diamond-like carbon films by ultrasonic surface waves

Other Title
Charakterisierung dünner diamantähnlicher Kohlenstoffschichten mittels Ultraschall-Oberflächenwellen
Abstract
The method of ultrasonic surface waves is suitable to determine the elastic modulus of thin diamond-like carbon films deposited on silicon wafers (111) by the laser-induced vacuum arc deposition (Laser-Arc) if frequencies in the range up to 100 MHz are used. Surface wave pulses have been generated in the thermoelastic regime by an eximer-laser (XeCl/308nm). The ultrasonic signals influenced by the film structure have been detected with a piezoelectric transducer. The surface wave phase velocity depending on frequency has been measured with a Fourier transformation technique. To calculate the elastic modulus of the films the inverse problem of surface wave dispersion in coated materials has been solved. Carbon films with a thickness of 300 nm deposited at different substrate temperatures in the range between 60 degree C and 500 degree C are studied. Young's modulus values up to 230 GPa were obtained for substrate temperatures smaller then 150 degree C. The very small modulus for T small er then 150 degree C suggest a drastic decrease of sp3/sp2 bonding ratio in the amorphous DLC-structure. These results correlate to optical studies. High frequency surface waves have been demonstrated to be a sensitive indicator for evaluating the C-film structure depending on the deposition conditions.
Author(s)
Schneider, D.
Hess, P.
Schwarz, T.
Scheibe, H.J.
Journal
Diamond and Related Materials  
Conference
Diamond Films 1992  
DOI
10.1016/0925-9635(93)90147-T
Language
English
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Keyword(s)
  • Diamantschicht

  • diamond-film

  • DLC-film

  • DLC-film Abscheidung

  • DLC-film characterization

  • DLC-film Charakterisierung

  • DLC-film deposition

  • DLC-Schicht

  • E-Modul

  • e-modulus

  • elastische Konstante

  • Laser-Arc

  • laser-induced film deposition

  • laserinduzierte Schichtabscheidung

  • LPVD

  • Oberflächenwelle

  • PVD-Technik

  • PVD-technique

  • ultrasonic surface wave

  • Young's modulus

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