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Characterization of pulsed laser deposited Ni/C-multilayers with hard and soft X-rays

: Holz, T.; Dietsch, R.; Mai, H.; Meyer, C.F.; Scholz, R.

Berliner Elektronenspeicherring-Gesellschaft für Synchrotronstrahlung mbH -BESSY-:
Berliner Elektronenspeicherring-Gesellschaft für Synchrotronstrahlung. Jahresbericht 1997
Berlin: BESSY, 1998
ISSN: 0179-4159
pp.431-433 : Ill., Lit.
Book Article
Fraunhofer IWS ()
Laserablation; monochromator; multilayer; Multischichtsystem; Ni/C; PLD; Röntgenspiegel; X-ray mirror

A graded Ni/C-multilayer was characterized at PTB labs at BESSY (SX 700). Reflectivities of up to 23.4 per cent for E=277eV were measured. The HREM (High Resolution Electron Microscopy) micrograph and the results of measurements of soft and hard X-ray reflectivity show the reproducibility of the deposited layer thicknesses in the layer stack. Simulations of hard and soft X-ray reflectivity confirm the prediction of interface roughnesses of 0.4nm and layer thickness deviations of 0.1nm.