Characterization of pulsed laser deposited Ni/C-multilayers with hard and soft X-rays

A graded Ni/C-multilayer was characterized at PTB labs at BESSY (SX 700). Reflectivities of up to 23.4 per cent for E=277eV were measured. The HREM (High Resolution Electron Microscopy) micrograph and the results of measurements of soft and hard X-ray reflectivity show the reproducibility of the deposited layer thicknesses in the layer stack. Simulations of hard and soft X-ray reflectivity confirm the prediction of interface roughnesses of 0.4nm and layer thickness deviations of 0.1nm.