Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Characterization of a new electron cyclotron resonance source working with permanent magnets
| Journal of vacuum science and technology B. Microelectronics and nanometer structures 9 (1991), No.2, pp.334-338
ISSN: 0734-211X
ISSN: 1071-1023 |
| Workshop on High-Density Plasma Techniques and Processes for Integrated Circuit Fabrication <1990, Burlingame/Calif.> |
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| English |
| Conference Paper |
| Fraunhofer ISIT () |