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Characterization of a new electron cyclotron resonance source working with permanent magnets

 
: Neumann, G.

:

Journal of vacuum science and technology B. Microelectronics and nanometer structures 9 (1991), No.2, pp.334-338
ISSN: 0734-211X
ISSN: 1071-1023
Workshop on High-Density Plasma Techniques and Processes for Integrated Circuit Fabrication <1990, Burlingame/Calif.>
English
Conference Paper
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/documents/PX-7473.html