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  4. Characterization of a-C - H films by raman and luminescence spectroscopy
 
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1987
Conference Paper
Title

Characterization of a-C - H films by raman and luminescence spectroscopy

Abstract
Raman and photoluminescence spectroscopy are reviewed and discussed as tools for the characterization of hydrogenated amorphous carbon (a-C:H) films. Thereby emphasis is laid on hard, strongly cross-linked films. Photoluminescence provides a quick measure for the film characteristic, either hard or soft and "polymerlike". Raman spectroscopy allows the analysis of extremely thin a-C:H films down to a layer thickness of approximate 10 A as well as the study of the film-substrate interface. Using electronic resonance effects Raman scattering gives insight into the microscopic structure of the films. In hard a-C:H experimental evidence is found for clustered sp2 sites connected by sp3 carbon. (IAF)
Author(s)
Koidl, P.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Ramsteiner, M.
Wagner, J.
Wild, C.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Mainwork
E-MRS Spring Meeting 1987. Proceedings. Vol.XVII  
Conference
European Materials Research Society (Spring Meeting) 1987  
Language
English
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Keyword(s)
  • amorpher Kohlenstoff

  • Photolumineszenzspektroskopie

  • Ramanstreuung

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