• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Artikel
  4. Characteristics of a two-component chemically-assisted ion-beam etching techniques for dry etching of high-speed multiple quantum well laser mirrors
 
  • Details
  • Full
Options
1995
Journal Article
Title

Characteristics of a two-component chemically-assisted ion-beam etching techniques for dry etching of high-speed multiple quantum well laser mirrors

Other Title
Eigenschaften der CAIBE-Ätztechnik zum Trochenätzen von Spiegel für Hochgeschwindigkeits-MQW-Laser
Abstract
We have developed a two-component chemically-assisted ion-beam etching (CAME) technique for dry-etching of high-speed multiple quantum well (MQW) laser mirrors. This two-component process relaxes several constraints in the dry-etching of AI containing opto-electronic device structures with Cl2 alone. The strained 3 x 100 My square meter In0.35 Ga0.65 As/GaAs undoped and p-doped 4-QW ridge waveguide lasers containing GaAs/AlAs binary short-period superlattice cladding layers with cavities fabricated by this CAME technique demonstrate record direct modulation bandwidths of 24 GHz(Ibias=25mA) and 33 Ghz (Ibis=65mA), respectively.
Author(s)
Sah, R.E.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Ralston, J.D.
Weisser, S.
Eisele, K.
Journal
Applied Physics Letters  
DOI
10.1063/1.114697
Language
English
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Keyword(s)
  • CAIBE

  • dry-etching

  • MQW-Laser

  • Trockenätzen

  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024