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Characteristics of a two-component chemically-assisted ion-beam etching techniques for dry etching of high-speed multiple quantum well laser mirrors

Eigenschaften der CAIBE-Ätztechnik zum Trochenätzen von Spiegel für Hochgeschwindigkeits-MQW-Laser

: Sah, R.E.; Ralston, J.D.; Weisser, S.; Eisele, K.

	Applied Physics Letters 67 (1995), pp.927-929 : Abb.,Lit. ISSN: 0003-6951 ISSN: 1077-3118

	English
	Journal Article
	Fraunhofer IAF ()
	CAIBE; dry-etching; MQW-Laser; Trockenätzen

Abstract
We have developed a two-component chemically-assisted ion-beam etching (CAME) technique for dry-etching of high-speed multiple quantum well (MQW) laser mirrors. This two-component process relaxes several constraints in the dry-etching of AI containing opto-electronic device structures with Cl2 alone. The strained 3 x 100 My square meter In0.35 Ga0.65 As/GaAs undoped and p-doped 4-QW ridge waveguide lasers containing GaAs/AlAs binary short-period superlattice cladding layers with cavities fabricated by this CAME technique demonstrate record direct modulation bandwidths of 24 GHz(Ibias=25mA) and 33 Ghz (Ibis=65mA), respectively.

: http://publica.fraunhofer.de/documents/PX-7458.html