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Buried silicon nitride formed by nitrogen implantation

Invited paper
 
: Vogt, H.; Beltz, J.; Zimmer, G.; Kaat, E.H. te

Electrochemical Society -ECS-:
The Electrochemical Society, Spring Meeting -SOI Symposium-
1986
Electrochemical Society (Meeting) <169, 1986, Boston/Mass.>
English
Conference Paper
Fraunhofer IMS ()

: http://publica.fraunhofer.de/documents/PX-7033.html