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  4. Broadband antireflection coatings deposited with ion-assisted evaporation
 
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1999
Conference Paper
Title

Broadband antireflection coatings deposited with ion-assisted evaporation

Abstract
SiO2, Ta2O5 and MgF2 have been deposited by electron beam evaporation under bombardment of ions generated by three different ion or plasma sources. Multilayer systems containing 5 to 12 layers have been designed and realized. The maximum reflectance R of a glass/air interface can be reduced down to R < 0.5 percent in a spectral region of 400 nm to 700 nm with each of such AR coatings mostly exceeds that of all-oxide system in the shorter wavelength region. With scanning scratch test the scratch resistance of the coatings have been determined relative to each other.
Author(s)
Laux, S.
Kaiser, N.
Niederwald, H.S.
Mertin, M.
Ehlers, H.
Ristau, D.
Mainwork
Advances in Optical Interference Coatings  
Conference
Conference on Advances in Optical Coatings 1999  
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Keyword(s)
  • antireflective coatings

  • ion-assisted deposition

  • scratch resistance

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