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Bogenquelle zum Vakuumbeschichten

Arc source for vacuum coating
: Reschke, J.; Erbkamm, W.; Nedon, W.; Pochert, R.; Scheffel, B.; Schiller, S.; Schmidt, H.

Frontpage ()

DE 1991-4109213 A: 19910321
DE 1991-4109213 A: 19910321
DE 4109213 C1: 19920409
Patent, Electronic Publication
Fraunhofer FEP ()

Known arc sources have, among other things, the disadvantage that macroparticles on the substrate to be coated negatively affect layer characteristics. It must be possible to achieve defined vaporization at a high rate free from macroparticles even with small currents. Changing the target should be easy. The known arc source has a pot-shaped cathode housing with a cooled jacket. The target (cathode) is directly attached to its thin-walled base and is replaceable. The magnet system is mounted in a rotatable bearing in the cathode housing directly under the base. The power supply unit for the arc current is connected to an electronic detector, a limiter and a controller in order to program and control the operating parameters of the arc source. The arc source is used for vacuum-coating of electrically conducting layers, preferably for tools, where high wear and tear resistance, adhesive strength and corrosion resistance are demanded.