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A bistable pneumatic microswitch for driving fluidic components

: Lisec, T.; Kreutzer, M.; Wagner, B.

Foundation for Sensor and Actuator Technology, Stockholm:
8th International Conference on Solid-State Sensors and Actuators 1995 and Eurosensors IX. Digest of technical papers. Vol. 2. Sessions A7-D13. Papers No.232-496
Stockholm: Congrex, 1995
ISBN: 91-630-3473-5
International Conference on Solid-State Sensors and Actuators <8, 1995, Stockholm>
Conference Paper
Fraunhofer ISIT ()

This paper presents fabrication and performance of a pneumatic 3/2-way switch for the actuation of passive fluidic components. The switch has two stable states which can be hold without additional power consumption. Two silicon microvalves, driven by thermally induced buckling of silicon microbridges, are acting as inlet and outlet of the operation volume. Powered with short electrical pulses the switch can be toggeled between the two stable states. With pulses of 10-120 ms duration at 4-4.5 W input power pressures of up to 4 bar can be controlled. Both large deflections (e.g. 1 cm piston movement) as well as high forces can be achieved.