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Bistable microvalve with pneumatically coupled membranes

 

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Institute of Electrical and Electronics Engineers -IEEE-:
International Workshop on Micro-Electro-Mechanical Systems 1996. Proceedings
Piscataway, NJ: IEEE, 1996
ISBN: 0-7803-2986-4
pp.384-388
International Workshop on Micro-Electro-Mechanical Systems (MEMS) <9, 1996, San Diego/Calif.>
English
Conference Paper
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/documents/PX-6782.html