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Mikromechanischer Schalter
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Patent
Title
Mikromechanischer Schalter
Inventor(s)
Schiele, I.
Vogel, S.
Kozlowski, F.
Link to Espacenet
http://worldwide.espacenet.com/publicationDetails/biblio?DB=worldwide.espacenet.com&locale=en_EP&FT=D&CC=DE&NR=19800189A
Patent Number
1998-19800189
Publication Date
2000
Language
German
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
