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Transparent crystalline aluminium oxide layers deposited by pulsed sputtering. Technical report 1995/2
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1995
Book
Title
Transparent crystalline aluminium oxide layers deposited by pulsed sputtering. Technical report 1995/2
Author(s)
Schiller, S.
Goedicke, K.
Hötzsch, G.
Language
English
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
