
Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Backside membrane structures for ISFETs applied in miniature analysis systems
Siehe auch: Sensors and Actuators B
| Giber, J.; Göpel, W.; Holmes, I.L.; Horvai, G.; Meixner, H.; Timar-Horvath, V. ; Budapesti Müszaki Egyetem, Eötvös Lorand Fizikai Tarsulat: Eurosensors VII. Book of Abstracts Budapest, 1993 pp.333-335 |
| Eurosensors <7, 1993, Budapest> |
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| English |
| Conference Paper |
| Fraunhofer IMS, Außenstelle Dresden ( IPMS) () |
| chemischer sensor; Fluidischer Aufnehmer; ISFET; Membran; sensor; SiliciumMembran |
Abstract
Coupling ISFETs to micro fluid systems, e.g. Si-based FIA, requires other technologies than packaging and encapsulation of single ISFETs. Backside membrane structures are fabricated to make possible an assembly using IC microfabrication technologies.