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Automatic parameter extraction system with process failure diagnosis for CMOS process

 
: Pieczinski, J.; Vogt, H.

Institute of Electrical and Electronics Engineers -IEEE-:
International Conference on Microelectronic Test Structures '89. Proceedings
New York/N.Y., 1989
pp.205-210
International Conference on Microelectronic Test Structures <1989, Edinburgh>
English
Conference Paper
Fraunhofer IMS ()
Parameterextraktion; Prozeßcharakterisierung; test; test insert

Abstract
An automatic system for process and device parameter extraction and failure analysis in CMOS process will be presented. The system checks in a short space of time whether the product parameters are within the specified tolerances. If not the diagnostic part of the program searches for the cause of the failure.

: http://publica.fraunhofer.de/documents/PX-5223.html