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Interferometric methods for surface metrology

: Broermann, E.; Pfeifer, T.; Tutsch, R.
: Society of Manufacturing Engineers -SME-, Dearborn/Mich.

Dearborn/Mich., 1989
Technical paper - Society of Manufacturing Engineers (MS), 89-480
International Conference and Exposition <1989, Detroit/Mich.>
Conference Proceedings
Fraunhofer IPT ()
Interferometrie; metrology; Oberflächenmeßtechnik; optical measuring instruments; Optische Meßtechnik; surface roughness

This paper presents a classification of the interferometric methods for surface metrology. Three scanning and three imaging surface profiles are described, all of which are commercially available. Technical data are given, and some characteristic features are discussed in comparison with stylus profilers.