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1992
Conference Proceeding
Titel
Information processing in semiconductor manufacturing
Abstract
The offered Technology Forum is a forum where the relevant topices of system integration are discussed in the view of information processing. The subjects of the lectures include all levels of information processing in manufacturing. The following subjects for example are deepened: logging and administration of operational data, control of manufacturing devices, cell controller, CAM system, communication technology (especially SECS).
Organisation
Fraunhofer-Institut für Produktionstechnik und Automatisierung -IPA-, Stuttgart