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  4. Atomic force microscopy on cross-section of optimal coatings: a new method
 
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1995
Journal Article
Title

Atomic force microscopy on cross-section of optimal coatings: a new method

Abstract
Two methods are described of preparing and investigating cross-sections of single layer and multilayer optical coatings by atomic force microscopy (AFM). The first consists of mechanical grinding and polishing followed by a final ion-polishing and etching procedure. The second is simply mechanically fracturing. The results obtained from both preparation methods are compared. In addition, cross-sectional transmission electron microscopy has been used to verify the AFM results.
Author(s)
Duparre, A.
Ruppe, C.
Pischow, K.A.
Adamik, M.
Barna, P.B.
Journal
Thin solid films  
DOI
10.1016/S0040-6090(94)06505-5
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Keyword(s)
  • atomic force microscopy

  • Oberflächenmorphologie

  • optical coating

  • optische Schicht

  • Rasterkraftmikroskopie

  • surface morphology

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