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Atomic force microscopy on cross-section of optimal coatings: a new method

: Duparre, A.; Ruppe, C.; Pischow, K.A.; Adamik, M.; Barna, P.B.


Thin solid films 261 (1995), pp.70-75
ISSN: 0040-6090
Journal Article
Fraunhofer IOF ()
atomic force microscopy; Oberflächenmorphologie; optical coating; optische Schicht; Rasterkraftmikroskopie; surface morphology

Two methods are described of preparing and investigating cross-sections of single layer and multilayer optical coatings by atomic force microscopy (AFM). The first consists of mechanical grinding and polishing followed by a final ion-polishing and etching procedure. The second is simply mechanically fracturing. The results obtained from both preparation methods are compared. In addition, cross-sectional transmission electron microscopy has been used to verify the AFM results.