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Atomic force microscopy at MHz frequencies

: Arnold, W.; Rabe, U.

Annalen der Physik 3 (1994), No.3, pp.589-598
Journal Article
Fraunhofer IZFP ()
acoustic microscopy; akustische Mikroskopie; atomic force microscopy; Kraftmikroskopie; Rasterkraftmikroskopie; Rastersondenmikroskopie; scanning force microscopy; scanning probe microscopy; Ultraschall; ultrasonic

Cantilevers of atomic force microscopes usually have spring constants of less than 1N/m and fundamental resonance frequencies of free vibration between 10 and 100 kHz. If, however, the tip is in contact with the surface of a sample vibratingat MHz frequencies, we have observed that the cantilever can be forced to vibrate also at these high frequencies with high amplitude. For the detection of the high frequency vibrations of the cantilever we added in our experiment a fast optical knife-edge detector ro a commercial Atomic Force Microscope. Ultrasonic pulses were excited by a piezoelectric transducer bonded to the sample and the ultrasonic signals transmitted to the cantilever were recorded. Furthermore, the vibrational amplitude of the cantilever was measured locally along the cantileve. For comparison we also measured the absolute surface amplitute by a Michelson-heterodyne intererometer. The spectral components of the cantilever viibration were examined and discussed theoretically.