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Assembly of hybrid micro systems in a large-chamber scanning electron microscope by use of mechanical grippers

: Weck, M.; Hümmler, J.; Petersen, B.


Chang, S.-C.; Pang, S.W. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Micromachining and microfabrication process technology III
Bellingham, Wash.: SPIE, 1997 (SPIE Proceedings Series 3223)
ISBN: 0-8194-2655-5
Conference on Micromachining and Microfabrication Process Technology <3, 1997, Austin/Tex.>
Symposium on Micromachining and Microfabrication <1997, Austin/Tex.>
Conference Paper
Fraunhofer IPT ()
gripper; hybrid micro system; micro assembly; Scanning Electron microscope; SEM

The assembly of hybrid micro systems is usually done by hand with the help of tweezers and optical microscopes. It is obvious, however, that only the automation will lead to an efficient and precise assembly process. This paper describes the design, the function and the application of mechanical grippers for automated micro assembly. These grippers are powered by piezo systems and are able to move their arms in sub-mu m steps in order to grip micro parts very precisely. They can be equipped with sensors for the detection of gripping force and have been designed especially for use in a large-chamber scanning electron microscope (LC-SEM). Process observation is a main problem in all aspects of micro technology. The LC-SEM allows on-line process observation with a very high depth of focus and a large lateral resolution. It has a 2 m3 vacuum chamber in which complete assembly units can be installed. Furthermore the electron gun is freely movable, so that a sample can be observed from all d irections. An additional advantage of this microscope is the clean production environment (vacuum).