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Aspects of TiN and Ti deposition in an ECR plasma enhanced CVD process
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1994
Conference Paper
Titel
Aspects of TiN and Ti deposition in an ECR plasma enhanced CVD process
Author(s)
Weber, A.
Hauptwerk
Materials Research Society. Fall Meeting '94. Proceedings
Konferenz
Materials Research Society (Fall Meeting) 1994
Language
English
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Fraunhofer-Institut für Schicht- und Oberflächentechnik IST