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Aspects of TiN and Ti deposition in an ECR plasma enhanced CVD process

 
: Weber, A.

Materials Research Society -MRS-:
Materials Research Society. Fall Meeting '94. Proceedings
Warrendale, Pa.: MRS, 1994
Materials Research Society (Fall Meeting) <1994, Boston/Mass.>
English
Conference Paper
Fraunhofer IST ()

: http://publica.fraunhofer.de/documents/PX-4687.html