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Electron probe microanalysis of Y-Ba-Cu-O superconducting materials

Vortrag an der Ecole Polytechnique Federale de Lausanne am 16. Januar 1991.
: Willich, P.

Fraunhofer IST ()
Bestimmung von Sauerstoff; chemical analysis; chemische Analyse; determination of oxygen; dünne Schicht; electron probe microanalysis; Elektronenstrahlmikroanalyse; high-temperature superconducting material; Hochtemperatursupraleiter; local surface analysis; lokale Oberflächenanalyse; thin films

EPMA is frequently used to study the composition of high-temperature superconducting oxides. Typical applications are local analysis on polycristalline ceramics, small single crystals, and thin films deposited on a substrate. Besides of the metal components it is possible to determine oxygen quantitatively and, as it is demonstrated by bulk ceramic samples, in good agreement with thermogravimetric experiments. Experimental and theoretical aspects of EPMA applied to Y-Ba-Cu-O materials are discussed in respect of sensitivity, accuracy of quantitation, and the characterization of thin films having a thickness of less than 1 mym.