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Detection limits of contamination analysis by nitrogen RBS

: Weidhaas, J.; Lang, W.

1990, 812-817
Quantitative Surface Analysis <6, 1990, London>
Conference Proceedings
Fraunhofer IFT; 2000 dem IZM eingegliedert
Rutherford scattering; surface analysis; trace element

Rutherford Backscattering Spectroscopy using a primary beam of Nitrogen Ions is a powerful tool to measure trace elements on surfaces. A detection limit of 10 high 10 At/square centimetre for heavy elements (gold) and 10 high 12 At/square centimetre medium elements (As) is reached.