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An approach to model based interferometry

 
: Pfeifer, T.; Mischo, H.; Evertz, J.; Manekeller, S.

Kunzmann, H.:
Progress in Precision Engineering and Nanotechnology
Braunschweig: Wirtschaftsverlag NW, 1997
ISBN: 3-9801433-9-2
pp.249ff
International Precision Engineering Seminar (IPES) <9, 1997, Braunschweig>
International Conference on Ultraprecision in Manufacturing Engineering (UMES) <4, 1997, Braunschweig>
English
Conference Paper
Fraunhofer IPT ()
Asphärenprüfung; automatische Justierung; Hindle-Test; interferometrische Formprüfung; modellgestützte Interferometrie

Abstract
One of the main problems in interferometric form testing is to distinguish form defects of the tested mirror from wavefront aberrations due to bad adjustment of the experimental set-up. Testing plane and spherical mirrors, an interpretation of the result is achieved using Zernike polynominals, for example, and fitting them to the measured wavefront. With increasing complexity of the measuring task (e.g. the interferometrical examination of hyperbolic or parabolic mirrors) it becomes more complicated to differentiate between defects of the mirror and the interferometer.This paper presents research work concerning the application of computer based adjustments to various complex types of interferometers with the objective of increasing the accuracy of interferometric measurements. This work is promoted by the Federal Ministry of Education, Science, Research and Technology.

: http://publica.fraunhofer.de/documents/PX-4467.html