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Application oriented modifications of deposition processes for DLC-based coatings
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1995
Conference Paper
Titel
Application oriented modifications of deposition processes for DLC-based coatings
Author(s)
Grischke, M.
Bewilogua, K.
Trojan, K.
Dimigen, H.
Hauptwerk
4th International Conference on Plasma Surface Engineering 1994. Papers
Konferenz
International Conference on Plasma Surface Engineering 1994
DOI
10.1016/0257-8972(94)08201-4
Language
English
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Fraunhofer-Institut für Schicht- und Oberflächentechnik IST