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  4. Application of the silicon technology for microsystems in the medical techniques
 
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1991
Conference Paper
Title

Application of the silicon technology for microsystems in the medical techniques

Abstract
Silicon technologies not only allows the fabrication of integrated analog and digital circuitry but also the fabrication of micro sensors for detection of physical and chemical parameters. In this paper different micro sensors will be presented and examples for their use in microsystems for medical applications will be given.
Author(s)
Mokwa, W.
Mainwork
Micro System Technologies '91  
Conference
International Conference on Micro Electro, Opto, Mechanic Systems and Components 1991  
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS  
Keyword(s)
  • Blutanalyse

  • Herzkatheter

  • invasives Monitoring

  • Medizintechnik

  • Mikrosensoren

  • Mikrosystemtechnik

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