Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Application of SiC-X-ray masks for fabrication submicron devices
| Lin, B.J. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Optical/laser microlithography
Bellingham, Wash.: SPIE, 1988 (Proceedings of SPIE 922)
ISBN: 0-89252-957-1 |
| Symposium on Microlithography <1988, Santa Clara/Calif.> |
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| English |
| Conference Paper |
| Fraunhofer ISIT () |