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Application of fracture machanics to micromechanics and microsystem technology
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1994
Conference Paper
Titel
Application of fracture machanics to micromechanics and microsystem technology
Author(s)
Michel, B.
Sommer, J.-P.
Großer, V.
Hauptwerk
Advances in fracture research and structural integrity. Selected papers
Konferenz
International Conference on Fracture (ICF) 1993
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM