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  4. Apparatus for measuring integrated light scattering of optical components over an extended range of wavelengths
 
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1996
Conference Paper
Title

Apparatus for measuring integrated light scattering of optical components over an extended range of wavelengths

Abstract
A total integrated scattering (TIS) measurement set-up is described which enables the detection of scattered light within a spatial frequency range from 0.0041 mu m(-1) to 4 mu m(-1). The apparatus is based on a Coblentz sphere and is equipped with light sources in the wavelength range from the UV to IR (248 nm - 10.6 mu m). Exemples are presented of measurements on samples with rms-roughness from angstroms to microns.
Author(s)
Duparre, A.
Gliech, S.
Mainwork
Specification, production, and testing of optical components and systems  
Conference
International Symposium on Optical Systems and Production 1996  
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Keyword(s)
  • Lichtstreuung

  • light scattering

  • Oberflächenrauheit

  • optical characterization

  • optische Charakterisierung

  • surface roughness

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