Zerstaeubungseinrichtung

The atomizing device is designed to coat large substrates with ferromagnetic and non-ferromagnetic materials. The device, consisting of a cathode (target), anode, magnetic system and power supply, is designed in such a way that the target consists of at least two isolated subtargets to which any voltages can be applied. The subtargets are attached to heat sinks which are also isolated. Magnetic units are arranged opposite to the target side of the substrate and they are coupled to the heat sinks by means of pole shoes. A realtive movement is possible between the magnetic units and the targets comprising the heat sinks.