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XPS studies of thin polycyanurate films on silicon wafers

XPS-Untersuchungen dünner Polycyanuratfilme auf Siliziumwafern


Fresenius Journal of Analytical Chemistry 353 (1995), pp.278-281
ISSN: 0937-0633
Journal Article
Fraunhofer IFAM ()
Fraunhofer IZM, Einrichtung Polymermaterialien und Composite ( Fraunhofer EPC) ()
cyanurate prepolymer; dünne Filme; molecular interaction; molecular orientation; Molekülorientierung; Molekülwechselwirkung; Röntgenphotoelektronenspektroskopie; silicon; Silizium; thin films; X-ray photoelectron spectroscopy; XPS

Tomographic scanners are classified by various parameters, and two which are important are the geometric resolution and the contrast resolution. A numerical study has been reported previously on the application of certain estimates of theoretical error in the tomographic inversion formula. This study deals with the experimental aspects of those error estimates, and further consolidates the findings of the previous work in representing contrast by a mathematical quantity related to the object cross-section. Thin films of a diandicyanato bisphenol A (DCBA) prepolymer on silicon substrates have been investigated. Angle dependend X-ray photoelectron spectroscopy reveals some thickness-dependent features, which lead to an adsorption model for the DCBA prepolymer molecules. The adsorption of the first layer is governed by the interaction of the triazine rings with the substrate surface.