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  4. XPS-investigations on laser-modified Si3N4 ceramics
 
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1997
Journal Article
Title

XPS-investigations on laser-modified Si3N4 ceramics

Other Title
Röntgen-Photoelektronenspektroskopie an laserstrukturierter Si3N4-Keramik
Abstract
For the ultimate use of micro machining in technology the interaction of laser light and silicon nitride ceramic have been studied. Using X-ray photoelectron spectroscopy (XPS), different effects generated by radiation from Nd:YAG (free running mode) and excimer lasers have been observed. With the Nd:YAG laser (lambda = 1.06 mu m), reaction zone depths of several 100 nm, apparently caused by melting, were found. The excimer laser treatment with a lower penetration depth of the light (lambda = 248 nm) led to very low chemical surface damage. Thus the excimer laser is favored for exact micro machining of nitride ceramics.
Author(s)
Oswald, S.
Burck, P.
Journal
Fresenius Journal of Analytical Chemistry  
DOI
10.1007/s002160050358
Language
English
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Keyword(s)
  • spektroskopische Oberflächencharakterisierung

  • Struktur

  • Mikroskopie

  • Keramik

  • Kohlenstoff

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