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X-Ray Structure Investigation of Lateral Surface Nanostructures - A Full Quantitative analysis of Non-Uniform Lattice Strain

: Baumbach, T.; Lübbert, D.; Gailhanou, M.


Journal of Physics. D. Applied Physics 32 (1999), pp.A208-A211
ISSN: 0022-3727
Journal Article
Fraunhofer IZFP ()
elastic constants; nanostructure; strain; surface characterization; x-ray inspection

Single and multilayer surface gratings of the system GaInAs/InP are studied by x-ray diffraction reciprocal space mapping. From the diffraction data we determine the gratting period and shape, the vertical compositional set-up and the non-uniform strain field caused by elastic strain relaxation after surface patterning. In particular, we report a full quantitative strain analysis of such structures. The fitting procedure is based on strain calculation employing linear elasticity theory.