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X-ray analysis of residual stress gradients and textures in thin coatings

Röntgenographische Analyse von Eigenspannungen und Texturen in dünnen Schichten
: Schubert, A.; Kämpfe, B.; Auerswald, E.

Materials Science Forum 133-136 (1993), pp.117-122
ISSN: 0255-5476
European Powder Diffraction Conference (EPDIC) <2, 1992, Enschede>
Conference Paper
Fraunhofer IZM ()
dünne Schicht; Eigenspannung; residual stress; Röntgenanalyse; Textur; texture; thin films; X-ray analysis

Coatings produced by different processes are often strongly textured and show lattice strains which correspond to high residual stresses. The question - do stress or texture gradients exist or not? - was tested by the help of normal Bragg-Brentano diffraction in symmetric case and asymmetric case beased on the grazing incidence. PVD (physical vapour deposition)-TiN coatings are discussed as a special case.