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1993
Journal Article
Titel
X-ray analysis of residual stress gradients and textures in thin coatings
Alternative
Röntgenographische Analyse von Eigenspannungen und Texturen in dünnen Schichten
Abstract
Coatings produced by different processes are often strongly textured and show lattice strains which correspond to high residual stresses. The question - do stress or texture gradients exist or not? - was tested by the help of normal Bragg-Brentano diffraction in symmetric case and asymmetric case beased on the grazing incidence. PVD (physical vapour deposition)-TiN coatings are discussed as a special case.