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Antireflection coatings for ultraviolet radiation obtained by molecular beam deposition

 
: Laux, S.; Mann, K.; Granitza, B.; Kaiser, U.; Richter, W.

:

Applied optics 36 (1996), pp.6216-6218
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
English
Journal Article
Fraunhofer IOF ()
antireflection coating; Antireflex-Beschichtung Ultraviolett; Fluoride; fluorides; laser induced damage threshold; laserinduzierte Zerstörschwelle; molecular beam deposition; Molekularstrahl-Abscheidung; ultraviolet

Abstract
Fluoride antireflection coatings on MgF2 substrates for a wavelength of 248 nm have been deposited by molecular beam deposition. Transmission and laser induced damage threshold of the samples have been measured and AFM investigations have been carried out. A 14-layer design for AR coatings with sublayer thicknesses of 12 nm is compared with a conventional 2-layer design with quarter wavelength thicknesses. The laser induced damage threshold of the 14-layer coating is slightly higher than that of the 2-layer coating. AFM surface images show that the 14-layer coating has a smoother surface than the 2-layer-coating.

: http://publica.fraunhofer.de/documents/PX-4151.html