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Title
VORRICHTUNG ZUR MESSUNG MECHANISCHER KRAEFTE UND KRAFTWIRKUNGEN
Date Issued
1995
Author(s)
Sandmaier, H.
Offereins, H.L.
Mayer, G.
Patent No
1989-3932618
Abstract
The description refers to a device for the measurement of mechanical forces and dynamic effects produced by means of micromechanical methods. Such devices comprise several components such as housing, substrate and sensor elements assembled using bonding or adhesive technology. Both stresses resulting from the different properties of the materials used and the stresses resulting from the jointing process are transferred to the sensor element and limit the measuring accuracy of the device. The device according to the invention is characterized by the substrate and/or the sensor element having weakpoints to prevent mechanical stresses. The device can be produced at low cost and is suitable for use in the automobile and domestic appliance industries and in industrial metrology.
Language
de
Patenprio
DE 1989-3932618 A: 19890929