• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Patente
  4. Anordnung zur Plasmaerzeugung
 
  • Details
Options
Patent
Title

Anordnung zur Plasmaerzeugung

Other Title
Setup for plasma generation
Abstract
The description refers to a setup for plasma generation as presented in the German patent application P 4304846.3-33, and comprises a microporous body and a voltage source which applies a voltage to spaced points on the microporous body. Another simplified variant of this setup is created by the fact that the body has a conductive base layer, an insulator layer arranged on top of the latter and a counter electrode layer arranged on top pf the insulator layer, that the pores are in the region of the surface of the body and extend from the surface of the body through the counterelectrode layer and through the insulator layer through to the base layer, and that the width of the pores in the parallel direction to the surface of the body is greater than the free path length of the electrons and smaller than twenty times the free path length of the electrons, whereby the free path length of the electrons depends on the type and pressure of the gas surrounding the setup.
Inventor(s)
Kozlowski, F.
Steiner, P.
Lang, W.
Link to:
Espacenet
Patent Number
1993-4315075
Publication Date
1994
Language
German
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024