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Anodic bonding with sputtered Pyrex glass
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1997
Conference Paper
Titel
Anodic bonding with sputtered Pyrex glass
Author(s)
Drost, A.
Scherbaum, S.
Klink, G.
Hauptwerk
Micro Materials. Micro Mat '97. Proceedings
Konferenz
Micro Materials (Micro Mat) 1997
Language
English
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