Options
1989
Conference Paper
Titel
Angle-resolved x-ray photoelectron spectroscopy as a noninvasive characterization technique for the surface region of processed -Hg, Cd-Te
Alternative
Winkelaufgelöste Röntgen-Photoelektron-Spektroskopie als nichtdestruktives Charakterisierungsverfahren für den Oberflächenbereich von prozesstechnisch behandeltem -Hg, Cd-Te
Abstract
The potential of angle-resolved x-ray photoelectron spectroscopy (ARXPS) for characterizing the surface region of processed compound semiconductor materials is explored with respect to depth-compositional profiling and with respect to assessing the crystalline surface structure. It is demonstrated by analyzing the sputtered surface region of a (Hg, Cd) Te wafer that ARXPS can readily distinguish between three different compositional zones regarding their sequence and their chemical nature in a depth region of about 50 A. The quantitative scaling of the depth profile is accomplished using a theoretical model of photoemission from a planar sample covered with two uniform overlayer. It is futher demonstrated, by analyzing a (Hg Cd) Te sample grown by liquid phase epitaxy on (111) oriented (Cd, Zn) Te, that azimuthal and polar variation in the angle-resolved photoemission of Hg, Cd and Te occur which are indicative of the phenomenon of x-ray photoelectron diffraction (XPD). The prominent m axima of the respective photoemissions were observed at three azimuthal angles (120 degree C periodicity) for a polar angle of about 35 degree C. A shift of 60 degree C betweeen the azimuthal maxima of the photoemission of Te and the metal atoms (Cd or Hg) is attributed to a reconstruction of the examined (111) surface.
Language
English
Tags
-
angle-resolved x-ray photoelectron spectroscopy
-
ARXPS
-
cadmium-zinc-tellurid
-
mercury-cadmium-telluride
-
nichtdestruktive Tiefenprofilanalyse
-
noninvasive depth profiling
-
Quecksilber-Kadmium-Tellurid
-
Röntgen-Photoelektronen-Beugung
-
winkelaufgelöste Röntgen-Photoelektron-Spektroskopie
-
x-ray photoelectron diffraction
-
XPD