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Title
Verfahren zur Herstellung von feinteiligen chloridfreien Siliciumcarbonitridpulvern
Date Issued
1997
Author(s)
Boden, G.
Herrmann, M.
Michael, G.
Patent No
1993-4303106
Abstract
The invention relates to the field of anorganic chemistry and ceramics, and the powder produced according to the invention can be processed, e.g. into nano-size ceramic Si<-3 N<-4 /SiC materials. The technical problem of the invention is to produce a powder, which can be used to produce Si<-3 N<-4-SiC composite materials with enhanced high-temperature properties, is solved by producing a mixture comprising vaporizable polysiloxanes containing a C-Si relationship of 1.5 to 4, which is vaporized at a temperature below the sublimation temperature of ammonium cloride and/or alkyl ammonium chloride in a protective gas or reactive gas flow comprising N<-2 or Ar or He and H<-2 and/or NH<-3, and finally pyrolized in the reactive gas flow at 600 to 1400 degrees Celsius for at least 1 s
Language
de
Patenprio
DE 1993-4303106 A: 19930204