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Verfahren zur Herstellung von duennen Schichten aus Zirkoniumdioxid

Process for the production of thin films made of zirconium dioxide
: Uhlig, H.; Vogel, S.; Kaiser, U.

Frontpage ()

DE 1992-4231779 A: 19920923
DE 1992-4231779 A: 19920923
DE 4231779 C1: 19930603
Patent, Electronic Publication
Fraunhofer IOF ()

The invention relates to a process for the production of thin films by depositing zirconium dioxide on a substrate, in particular for an optical interference coating system, whereby elementary zirconium is deposited in a vacuum in a vacuum chamber, permitting the ingress of a reactive gas into the vacuum chamber. The invention provides a solution to the problem for a process with which it is possible, without any additional measures such as preparation of the molten metal using oxygen, to produce thin films made of zirconium dioxide having a high refractive index and low absorption. The invention achieves this by using water vapour as the reactive gas and by working at a water vapour pressure of 0.005 to 0.01 Pa and at a vapour deposition rate of less than or equal to 0.7 nm s->-1. The substrate temperature is preferably 300Celsius.