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Patent
Title
Verfahren zur Herstellung und Verwendung eines piezoelektrischen Bauelementes
Other Title
Piezoelectric component production by sol-gel coating of a metal substrate.
Abstract
NOVELTY - Piezoelectric components are produced by applying a coating sol of a hydrated lead salt, zirconium and titanium alcoholates and a complexing agent onto an electrically conductive substrate, and then heat treating. DETAILED DESCRIPTION - Piezoelectric components are produced by: (a) preparing a storable solid precursor of a coating sol of a hydrated lead salt, a zirconium alcoholate and a titanium alcoholate by using a complexing agent and carrying out a hydrolysis reaction and vacuum extraction of solid constituents; (b) dissolving the solid precursor in a solvent; (c) applying the resulting sol as one or more layers on one or both sides of an electrically conductive substrate of steel, Ti, Cr, Ni or their alloys; (d) heat treating the layer(s); and (e) applying one or more electrodes onto the resulting thin ferroelectric layer or multilayer system. USE - As a piezoelectric bending transducer (claimed), useful for a piezoceramic actuator or sensor, e.g. a micromechanical adju ster, an optical component, a pneumatic valve or sensor or an acoustic transducer. ADVANTAGE - The process permits simple and inexpensive application of piezoelectric ceramic layers onto metal (especially steel) substrates, without inter-diffusion problems, for production of components with high sensitivity and response.
Inventor(s)
Merklein, S.
Patent Number
1997-19744630
Publication Date
1999
Language
German