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Title
Verfahren zur Herstellung organisch modifizierter Oxid-, Oxinitrid- oder Nitridschichten durch Vakuumbeschichtung und danach beschichtetes Substrat
Date Issued
2000
Author(s)
Neumann, M.
Schiller, S.
Morgner, H.
Schiller, N.
Straach, S.
Patent No
1995-19548160
Abstract
Organically modified oxide and/or nitride coatings are produced continuous substrates (1) by high rate vaporisation of oxide forming reactive material (5) which passes through a high density plasma (6) as it mixes with oxygen and nitrogen fed from tubes (8,9) and gaseous monomer material fed from tubes (10,11). USE - To produce transparent foil for packaging and transparent corrosion and wear resistant coatings for window surfaces, decorative surfaces or building cladding. ADVANTAGE - Coatings are produced at a high coating rate,preferably 20-1000 nm/second and besides having good corrosion and wear resistance also have good flexibility which enables further working. Coatings have high homogeneity over large surface areas.
Language
de
Patenprio
DE 1995-19548160 A: 19951222