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Title
Verfahren zur Anpassung des Generators bei bipolaren Niederdruck-Glimmprozessen
Date Issued
1999
Author(s)
Kirchhoff, V.
Schiller, S.
Reschke, J.
Goedicke, K.
Patent No
1993-4324683
Abstract
In order to perform bipolar low-pressure glow processes, a static and dynamic matching of the generator to the electrodes in large power and frequency ranges is required. Known processes require either a high technical effort or are not applicable in the range. According to the invention, the operative time for the glow process during the positive and/or negative half-wave is controlled in such a way that at least no energy is applied for the period of part of a negative and/or positive half-wave of the glow equipment. The invention is applied to the plasma treatment of surfaces, deposition of layers from the plasma and plasma-aided surface cleaning.
Language
de
Patenprio
DE 1993-4324683 A: 19930722