Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Verfahren zum Herstellen von elektrolumineszenten Siliziumstrukturen
Process for the production of electroluminescent silicon structures
| DE 1991-4126955 A: 19910814 |
| DE 1991-4126955 A: 19910814
EP 1992-915971 A: 19920720 |
| DE 4126955 C2: 19940505
EP 598755 A: 19940601 |
| H01L0033 |
|
| German |
| Patent, Electronic Publication |
| Fraunhofer IZM () |
Abstract
The proposal refers to a process for the production of electroluminescent silicon structures comprising the following process steps: - Immersion of a silicon wafer in an acid bath; - Anodization of the silicon wafer in the acid bath; - Exposure of the silicon wafer on its anodic side at least for part of the time during which it is immersed and anodized in the acid bath; this causes the monocrystalline silicon of the silicon wafer to change into a microporous silicon layer at least in areas; - Production of second contacts (13, 14) via which a voltage can be applied to the microporous silicon layer (10).