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Verfahren zum Herstellen eines Kontakthoeckers durch Umschmelzen einer Kontaktflaechenmetallisierung

Verfahren zum Umschmelzen einer Kontaktflaechenmetallisierung (A1)
Process for the re-fusion of a contact area metallization
 

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Frontpage ()

DE 1995-19504350 A: 19950210
DE 1995-19504350 A: 19950210
DE 19504350 C2: 19970410
H01L0021
German
Patent, Electronic Publication
Fraunhofer IZM ()

Abstract
Process for the re-fusion of a contact area metallization (13) applied to a substrate (10) in an inert or reduced medium, whereby the medium (18) is formed as an alcoholic medium whose melting temperature is equal to or above the melt temperature of the contact area metallization (13), the medium (18) is applied to the contact area metallization (13) applied outside the inert or reduced medium onto a contact area (11, 12) of the substrate (10) in such a way that the contact area metallization (13) is shielded from the environment and the medium (18) is tempered to a temperature which is equal to or higher than the melting temperature of the contact area metallization (13).

: http://publica.fraunhofer.de/documents/PX-38865.html