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Verfahren zum Beschichten von Duennfilmmagnetplatten

Thin film coating method for magnetic record carrying disks - involves setting pulse repetition frequency and setting ratio of pulse length and pulse duration according to target value of coercivity field strength for predetermined layer thickness.
 
: Goedicke, K.; Winkler, T.; Junghaehnel, M.; Lang, A.; Meyer, D.; Mueller, M.; Schneider, H.H.; Schneider, R.C.

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Frontpage ()

DE 1997-19720251 A: 19970515
DE 1997-19720251 A: 19970515
DE 19720251 A1: 19981119
G11B0005
German
Patent, Electronic Publication
Fraunhofer FEP ()

Abstract
is used to coat thin film magnetic plates having a substrate. The method involves sputtering the magnetic substrates to provide a layer system, with a lower layer, a magnetic memory layer and a cover layer. While applying the lower layer and/or the magnetic memory layer, the energy is fed into the plasma in pulse form. A pulse repetition frequency of (10) to (80) kHz is set. For a predetermined layer thickness the ratio of pulse length and pulse duration is set according to the target value for the coercivity field strength. Preferably the substrate temperature on applying the lower layer and/or the magnetic layer is set to 200 to 230oC. The pressure is preferably set to 0.8 Pa. ADVANTAGE - Achieves high coercivity field strength and memory density with given layer thickness and high reproducibility. Can be carried out using simple technology.

: http://publica.fraunhofer.de/documents/PX-38782.html