1992
Conference Paper
Title

Analytical observations and depth profile simulation in regular-d and graded-d metal/carbon multilayers prepared by laser pulse vapour deposition.

Other Title
Analytische Untersuchungen und Tiefenprofilsimulation an mittels Laserimpuls-Gasphasenabscheidung hergestellten Metall/Kohlenstoff Multischichten regulärer und veränderlicher Schichtdickenfolge
Abstract
Multilayer structures are characterized by TEM, XD, AES and SNMS. Results obtained for X-ray optical behaviour, layer stack morphology and microstructure of individual layers will be described and their explanation is supported by computer simulation data.
Author(s)
Dietsch, R.
Hopfe, S.
Mai, H.
Oertel, G.
Pompe, W.
Prokop, M.
Schöneich, B.
Völlmar, S.
Wehner, B.
Weißbrodt, P.
Werner, P.
Mainwork
Conference
Language
English
Keyword(s)