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Verfahren und Vorrichtung zur Plasmamodifizierung von flaechigen poroesen Gegenstaenden

Process and device for the plasma modification of flat porous objects
 
: Oehr, C.; Schindler, B.; Vohrer, U.; Müller, M.

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Frontpage ()

DE 1994-4426229 A: 19940722
DE 1994-4432919 A: 19940915
EP 1995-111614 A: 19950724
DE 4432919 C2: 19971023
EP 695622 B1: 20011114
B05D0003
B29C0059
German
Patent, Electronic Publication
Fraunhofer IGB ()

Abstract
The invention relates to a process for the modificaiton of flat objects using low-pressure plasma, characterized by the fact that a differential pressure is applied to the reaction chamber between the process gas inlet and the plasma outlet in such a way that the plasma is guided through the flat object.

: http://publica.fraunhofer.de/documents/PX-38714.html