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Verfahren und Vorrichtung zur Plasmamodifizierung von flaechigen poroesen Gegenstaenden

Process and device for the plasma modification of flat porous objects

: Oehr, C.; Schindler, B.; Vohrer, U.; Müller, M.

	DE 1994-4426229 A: 19940722
	DE 1994-4432919 A: 19940915 EP 1995-111614 A: 19950724
	DE 4432919 C2: 19971023 EP 695622 B1: 20011114
	B05D0003 B29C0059

	German
	Patent, Electronic Publication
	Fraunhofer IGB ()

Abstract
The invention relates to a process for the modificaiton of flat objects using low-pressure plasma, characterized by the fact that a differential pressure is applied to the reaction chamber between the process gas inlet and the plasma outlet in such a way that the plasma is guided through the flat object.